Designing physical sensor systems that can operate under ambient conditions plays a crucial role in addressing environmental and biological challenges. In this talk, I will provide an overview of various micro/nanoscale resonator-based sensor platforms we have developed using nanoelectromechanical systems (NEMS) and microwave technologies, within this vision.
Nanomechanical resonators enable the characterization of individual nanoparticles and viruses within the mass range of hundreds of MegaDaltons (MDa), offering mass resolution on the order of a few MDa under ambient conditions. However, transporting the particles to the nanoscale detection cross-section has long posed a significant challenge. Using an ion lens integrated onto the NEMS chip [1], we achieved high-efficiency nanoparticle detection with our ‘self-focusing’ NEMS technology. We will discuss this mechanism along with our recent geometrically enhanced measurement results [2].
Selim Hanay has received incentive awards from national research institutions such as TÜBİTAK, TÜBA, and the Science Academy of Turkey. He is also the recipient of an ERC Starting Grant and an ERC Proof-of-Concept Grant.